Principle of diffusion silicon pressure sensor:
Diffusible silicon pressure sensors, with table pressure, absolute pressure and differential pressure products; Diffusion silicon pressure sensor with monocrystalline silicon as the sensor with the force sensor, adopting the metal diaphragm seal filling structure, can be applied to all kinds of corresponding measurement occasions. Therefore, diffusion silicon pressure sensor is also called diffusion type single crystal silicon pressure sensor.
Monocrystalline silicon is a kind of important semiconductor materials, it is composed of polycrystalline silicon control, more than in the past for transistor, rectifier and solar cells, etc. With the progress of electronic technology, has successfully developed in recent years - diffusion type monocrystalline silicon piezoresistive strain component, and access to applications.
Diffusion type monocrystalline silicon is in single crystal silicon, mixed with a certain amount of impurities by diffusion process, to change the electrical properties and electrical resistivity values. Mixed with number of contaminants and resistivity of monocrystalline silicon has a direct relationship. Diffusion is monocrystalline silicon piezoresistive type strain components, also can saying is a kind of solid silicon resistors, its resistance change is proportional to the of mechanical stress, can produce electrical signal proportional to pressure. The performance achieved to some areas of science and technology created a new application conditions. Recently has been widely used in industry and aerospace pressure measurement, shock wave and explosion test, as well as the hydraulic and pneumatic measurement system, etc.
Diffusion silicon pressure sensor using monocrystalline silicon as a pressure sensor is sensitive to the pressure signal conversion element, replace the old corrugated pipe, semiconductor strain gauge sensor, etc. It has high precision, good linear, and the advantages of small volume, and has a wide dynamic range, is the ideal pressure and electrical signal conversion components.
Diffused silicon monocrystalline silicon by N type commonly item of diaphragm and p-type silicon strain sensitive layer. Container pressure and use it to complete the pressure medium and the electrical signal conversion, is in a circular diaphragm, using the method of integrated circuit technology set a value equal to the song to form balanced bridge resistance. The sides of the diaphragm (silicon cup) fixed with a circle. On both sides of the diaphragm, there are two pressure chamber, a high pressure chamber is connected with cable, another is interlinked with the atmosphere of low pressure cavity. When when there is a pressure difference on both sides of the diaphragm, diaphragm on each point stress exists, four resistance change under the effect of stress resistance, bridge and strike balance output corresponding voltage loss, this is directly proportional to the voltage and the pressure difference on both sides of the diaphragm in this way, the size of the differential pressure on the diaphragm Directly by unbalanced bridge is the bullet out the corresponding output voltage, breaks the past pressure sensor used in the electrical signal conversion mechanism muscle. Using diffusion silicon element, not only reduces the volume of a pressure sensor, and sensing performance is stable. The current production of diffused silicon membrane pressure sensor, the diffusion method is adopted in the silicon membrane made of four work of wheatstone bridge, bridge arm using anisotropic etching technology makes the stress concentration to measure area, and still maintain a low stress level elsewhere. Under the same vibration frequency, seed selection pressure sensor with higher sensitivity and good linearity, right three times even in the whole range, under the pressure of the properties remain unchanged.
Working principle:
The measured medium pressure directly effect on the sensor diaphragm (stainless steel or other corrosion resistant elastic metal), make the diaphragm produces the micro displacement is proportional to the medium pressure, the sensor resistance change, use of electronic circuit to detect the change, and the transformation output of a standard measurement signal corresponding to the pressure.
Product use:
Dongguan Pyle resistance instrument co., LTD., production CYX21 series pressure oil core Swiss of imported high accuracy, high stability force sensitive chip, using advanced technology, strict production conditions and precision equipment manufacturing. Suitable for 316 l stainless steel material, no corrosion gage pressure, absolute pressure, differential pressure, pressure measurement occasions. Diffusion silicon core body is the core component of manufacturing pressure sensor and pressure transmitter, a pressure measurement as a kind of high performance products, can be easily signal amplification processing, assembly into a standard signal output of the transducer, widely used in petroleum, chemical industry, metallurgy, electric power, aviation, medical equipment, automotive, HVAC industry such as process control, etc.
